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MEMS
Micro Electro-Mechanical Systems can contain small mechanical,
optical and electronic elements produced by litographic
techniques. Valley stocks and processes many of the
materials, including ultra thin, for use in these applications.
Silicon-Direct-Bonding (SDB) or Wafer-Direct-Bonding
(WDB) also referred to as Fusion Bonding is accomplished
when smooth and flat Silicon surfaces are brought together
at high temperature. High quality surface finishes (<10A),
when required, are provided by Valley Design.
Anodic Bonding, also referred to as Electrostatic Bonding,
is a process where glass to Silicon or a metal is permanently
attached with an irreversible chemical bond. This is
accomplished with heat and high voltage.
SOI Silicon-On-Insulator refers to a thin layer of
Silicon on top of an insulating layer such as glass
or Silicon Oxide.
For answers to your complex technology needs, come
to the company that has been a leader in advanced and
ultra thin materials processing for nearly 30 years.
Valley had pioneered the innovative techniques used
to produce the substrates and components for MEMS and
many other applications. Valley also stocksmany of
these materials.
Additional information on MEMS and other related processes:
· www.customdicing.com/bonded-wafers.htm
Dicing bonded wafers
· www.valleydesign.com/pr8.htm
Polished glass wafers and substrates to SEMI standards
· www.sensorsmag.com
Silicon wafer bonding
· www.siliconwafers.net/thinned.htm
Silicon wafers thinned to produce thinner dice-chips
· www.quartz-silica.net
Fused Silica substrates and wafers
· www.edgepolishing.com/die-thinning.htm
Wafer and die thinning technology
· www.customdicing.com/thin-dice.htm
Thin dice by thinning after dicing
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