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The
thinnest Sapphire wafers and parts can be made from
A-plan [1120] orientation. Thinness of 10 microns (0.0004")
has been achieved, but not easily.
With R-plane [1102] sapphire orientation, a realistic
thickness for wafers and substrates is in the 100 to
125 micron range (0.004 to 0.005").
Size is not a real limitation for thin wafers and substrates.
Parts 12½" x 2½" x 0.0035"
have been produced in polished Sapphire.
Depending on orientation, the best surface finish of
a few Angstroms is attainable and for these finishes,
measurements are made on
WYKO non-contact interferometer.
Other Sapphire related services provided include edge-angle
polishing, wafer thinning and dicing.
Available from stock are A-plane sapphire wafers to
thinness of 0.001" (25 microns) and in R-plane
sapphire wafers, starting at 0.005" (125 microns).
Sapphire wafer and substrate related Web sites:
· www.customdicing.com/sapphire.htm
Dicing of Sapphire wafers and substrates
· www.valleydesign.com/sapp.htm
Polished Sapphire wafers, disks and washers
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